Research Article
Structure and Properties of Nanocrystalline (TiZr)xN1−x Thin Films Deposited by DC Unbalanced Magnetron Sputtering
Table 3
Colorations, residual stresses, and hardness values of films deposited at various nitrogen flow rates.
| | Sample numbers | Nitrogen flow rate (sccm) | Coloration | Residual stress (GPa) (2%) |
Hardness (GPa) (8%) |
Resistivity (·cm) | | | |
| | N00 | 0 | 82.3 | 1.6 | 3.8 | | 6 | | | N04 | 0.4 | 79.1 | 1.7 | 4.2 | | 19 | | | N05 | 0.5 | 79.7 | 1.9 | 4.4 | | 18 | | | N06 | 0.6 | 81.2 | 1.6 | 5.4 | | 27 | | | N07 | 0.7 | 83 | 1.6 | 8.14 | | 33 | | | N10 | 1 | 83.7 | 3.3 | 28.6 | | 35 | | | N13 | 1.3 | 84 | 3.1 | 28.9 | | 33 | | | N16 | 1.6 | 84.1 | 3.5 | 29.4 | | 37 | | | N19 | 1.9 | 83.7 | 3.3 | 29.6 | | 38 | | | N22 | 2.2 | 82.6 | 4.3 | 30.5 | | 38 | | | N25 | 2.5 | 82.4 | 4.4 | 30.1 | | 38 | |
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