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Journal of Nanomaterials
Volume 2016 (2016), Article ID 3727514, 8 pages
Research Article

A Method to Control Dynamic Errors of the Stylus-Based Probing System for the Surface Form Measurement of Microstructures

School of Manufacturing Science and Engineering, Sichuan University, 24 South No. 1 Ring Road, Chengdu 610065, China

Received 25 December 2015; Accepted 12 April 2016

Academic Editor: James Piao

Copyright © 2016 Hui Fang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


Dynamic errors of the stylus-based probing system seriously affect the measurement accuracy in surface quality detection on microstructures. A method, which is focused on measuring the surface form of microgears, microholes on the injector nozzle, and so forth, is proposed to control dynamic errors of the stylus-based probing system. Firstly, two kinematical models were built to systematically investigate the dynamic performance of the stylus-based probing system, and the relationship between the measuring force, scanning speed, fidelity, and dynamic errors was described. Then, numerical simulations of the surface form measurement, in which a sine-shaped microstructure was taken as a target surface, were carried out. Results of the numerical simulations reveal that the dynamic errors were affected by the scanning speed and the initial position of the measured specimen. Lastly, a method to control dynamic errors by properly setting up the scanning speed and the initial position of the specimen was proposed for the surface form measurement of microstructures.