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Journal of Nanomaterials
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Journal of Nanomaterials
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2016
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Article
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Fig 1
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Research Article
A Method to Control Dynamic Errors of the Stylus-Based Probing System for the Surface Form Measurement of Microstructures
Figure 1
(a) Schematic of the stylus flight. (b) Kinematical model of the stylus-based probing system.
(a)
(b)