Table of Contents Author Guidelines Submit a Manuscript
Journal of Nanomaterials
Volume 2016 (2016), Article ID 3727514, 8 pages
http://dx.doi.org/10.1155/2016/3727514
Research Article

A Method to Control Dynamic Errors of the Stylus-Based Probing System for the Surface Form Measurement of Microstructures

School of Manufacturing Science and Engineering, Sichuan University, 24 South No. 1 Ring Road, Chengdu 610065, China

Received 25 December 2015; Accepted 12 April 2016

Academic Editor: James Piao

Copyright © 2016 Hui Fang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. H. N. Hansen, K. Carneiro, H. Haitjema, and L. De Chiffre, “Dimensional micro and nano metrology,” CIRP Annals—Manufacturing Technology, vol. 55, no. 2, pp. 721–743, 2006. View at Publisher · View at Google Scholar · View at Scopus
  2. E. Peiner, M. Balke, and L. Doering, “Form measurement inside fuel injector nozzle spray holes,” Microelectronic Engineering, vol. 86, no. 4–6, pp. 984–986, 2009. View at Publisher · View at Google Scholar · View at Scopus
  3. B. Xu, Y. Shimizu, T. Takeishi, S. Ito, and W. Gao, “Surface form measurement and analysis of a cylindrical workpiece with microstructures,” Journal of Advanced Mechanical Design, Systems and Manufacturing, vol. 6, no. 6, pp. 936–948, 2012. View at Publisher · View at Google Scholar · View at Scopus
  4. B.-F. Ju, Y.-L. Chen, W. Zhang, and F. Z. Fang, “Rapid measurement of a high step microstructure with 90° steep sidewall,” Review of Scientific Instruments, vol. 83, no. 1, Article ID 013706, 2012. View at Publisher · View at Google Scholar · View at Scopus
  5. M. B. Bauza, S. C. Woody, B. A. Woody, and S. T. Smith, “Surface profilometry of high aspect ratio features,” Wear, vol. 271, no. 3-4, pp. 519–522, 2011. View at Publisher · View at Google Scholar · View at Scopus
  6. J. D. Claverley and R. K. Leach, “A vibrating micro-scale CMM probe for measuring high aspect ratio structures,” Microsystem Technologies, vol. 16, no. 8-9, pp. 1507–1512, 2010. View at Publisher · View at Google Scholar · View at Scopus
  7. H. Fang, B. Xu, W. Chen, H. Tang, and S. Zhao, “A slope-adapted sample-tilting method for profile measurement of microstructures with steep surfaces,” Journal of Nanomaterials, vol. 2015, Article ID 253062, 8 pages, 2015. View at Publisher · View at Google Scholar · View at Scopus
  8. X. Liu, D. G. Chetwynd, S. T. Smith, and W. Wang, “Improvement of the fidelity of surface measurement by active damping control,” Measurement Science & Technology, vol. 4, no. 12, pp. 1330–1340, 1993. View at Publisher · View at Google Scholar · View at Scopus
  9. Y. Tian, X. Liu, D. G. Chetwynd, V. Eichhorn, S. Fatikow, and D. Zhang, “Nonlinear viscoelastic modelling of stylus probing for surface metrology,” Precision Engineering, vol. 37, no. 3, pp. 711–720, 2013. View at Publisher · View at Google Scholar · View at Scopus
  10. P. Pawlus and M. Śmieszek, “The influence of stylus flight on change of surface topography parameters,” Precision Engineering, vol. 29, no. 3, pp. 272–280, 2005. View at Publisher · View at Google Scholar · View at Scopus
  11. B. Xu, Y. Shimizu, S. Ito, and W. Gao, “Surface profile measurement of internal micro-structures,” International Journal of Precision Engineering and Manufacturing, vol. 14, no. 9, pp. 1535–1541, 2013. View at Publisher · View at Google Scholar
  12. M. N. H. Damir, “Error in measurement due to stylus kinematics,” Wear, vol. 26, no. 2, pp. 219–227, 1973. View at Publisher · View at Google Scholar · View at Scopus
  13. D. J. Whitehouse, “Dynamic aspects of scanning surface instruments and microscopes,” Nanotechnology, vol. 1, no. 1, pp. 93–102, 1990. View at Publisher · View at Google Scholar · View at Scopus
  14. D. J. Whitehouse, “Enhancement of instrument and machine capabilities,” Nanotechnology, vol. 7, no. 1, pp. 47–51, 1996. View at Publisher · View at Google Scholar · View at Scopus
  15. J. I. McCool, “Assessing the effect of stylus tip radius and flight on surface topography measurements,” Journal of Tribology, Transactions of the ASME, vol. 106, no. 2, pp. 202–209, 1984. View at Publisher · View at Google Scholar · View at Scopus
  16. J. F. Song and T. V. Vorburger, “Stylus flight in surface profiling,” Journal of Manufacturing Science and Engineering, vol. 118, p. 11, 1996. View at Google Scholar
  17. Y. Tian, X. Liu, D. G. Chetwynd, B. Shirinzadeh, and D. Zhang, “Vibration analysis of stylus instrument for random surface measurement,” Precision Engineering, vol. 34, no. 3, pp. 586–591, 2010. View at Publisher · View at Google Scholar · View at Scopus
  18. Y. Tian, X. Liu, D. Zhang, and D. G. Chetwynd, “Dynamic modelling of the fidelity of random surface measurement by the stylus method,” Wear, vol. 266, no. 5-6, pp. 555–559, 2009. View at Publisher · View at Google Scholar · View at Scopus
  19. K.-W. Lee, Y.-J. Noh, W. Gao et al., “Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures,” International Journal of Precision Engineering and Manufacturing, vol. 12, no. 4, pp. 671–678, 2011. View at Publisher · View at Google Scholar · View at Scopus