Determination of the Elastic Behavior of Silicon Nanowires within a Scanning Electron Microscope

Figure 2

Force-displacement curves for the 74 nm wide nanowire: (a) results of 15 experiments; the inset shows a schematic of the testing set-up, and (b) overlay of the mean experimental curve and FEM simulations for a modulus of elasticity of 169 GPa.

(a)

(b)