Table 2: Elastic modulus and hardness of S-0 and S-60 BFO thin films obtained from different deposition methods.

Method (GPa) (GPa)

Atomic layer deposition (ALD)111.11–118.317.50–7.96
Radio frequency magnetron sputtering [7]131.4–170.86.8–10.6
Sol-gel [8]26–512.8–3.8
Pulsed laser deposition [18]100
First-principles calculation [19]G-AFM - 142.19
C-AFM - 144.87