Synthesis of Silicon Nanoparticles and Nanowires by a Nontransferred Arc Plasma System

Table 2

Mean particle sizes at the chamber cover in different input powers of 9, 11, and 13 kW at the fixed plasma forming gas flow rate of 15 L/min.

	Raw material	Product at reaction tube	Product at chamber cover
Grain size	40.98 nm	34.13 nm	29.26 nm