Effect of O₂/Ar Gas Flow Ratios on Properties of Cathodic Vacuum Arc Deposited ZnO Thin Films on Polyethylene Terephthalate Substrate

Table 1

Material properties of the room-temperature deposited ZnO films on the PET substrate with various O₂/Ar gas flow ratios.

O2/Ar	6 : 1	7 : 1	8 : 1	9 : 1	10 : 1
Intensity of (002) (a.u.)	620	87	87	27	3
2θ (°)	34.31	34.28	34.28	34.22	34.19
FWHM	0.38	0.37	0.36	0.51	0.526
(nm)	22.2	22.8	23.4	16.5	16.0
(nm)	0.2615	0.2613	0.2611	0.2612	0.2612
(nm)	0.523038	0.522668	0.522299	0.522476	0.5243
(Pa)