Chemical-Vapor-Deposited Graphene as Charge Storage Layer in Flash Memory Device

<div>(a) The schematic of graphene flash memory cell (Au/Al<sub>2</sub>O<sub>3</sub>/graphene/SiO<sub>2</sub>/p-Si). (b) Top-view of fabricated graphene flash memory cell. The scale bar is 20 <i>μ</i>m. (c) Process flow of fabricated graphene flash memory cell.</div>

Journal of Nanomaterials

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Figure 1

Figure 1: Chemical-Vapor-Deposited Graphene as Charge Storage Layer in Flash Memory Device 