Recent Advances in Unconventional Lithography for Challenging 3D Hierarchical Structures and Their Applications

Figure 1

Various unconventional lithographic processes. Schematic illustration of (a) thermal nanoimprint lithography (T-NIL, also called hot embossing) and UV nanoimprint lithography (UV-NIL, also called photocurable nanoimprint lithography), (b) capillary force lithography (CFL), (c) nanotransfer printing lithography (NTL), (d) colloidal lithography (CL, also called nanosphere lithography), and (e) block copolymer lithography (BCPL).

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