The Optimum Fabrication Condition of p-Type Antimony Tin Oxide Thin Films Prepared by DC Magnetron Sputtering

Figure 12

The O 1S XPS spectra (open circles) and deconvoluted results (line) of (a) SnO₂, (b) 5%, (c) 10%, and (d) 15% ATO films annealed at 500°C for 2 h after being deposited at room temperature.

(a)

(b)

(c)

(d)