Research Article
The Optimum Fabrication Condition of p-Type Antimony Tin Oxide Thin Films Prepared by DC Magnetron Sputtering
Figure 13
The Sn3d5/2 XPS spectra of (a) SnO2, (b) 5%, (c) 10%, and (d) 15% ATO films annealed at 500°C for 2 h after being deposited at room temperature.
| (a) |
| (b) |
| (c) |
| (d) |