Research Article
The Optimum Fabrication Condition of p-Type Antimony Tin Oxide Thin Films Prepared by DC Magnetron Sputtering
Table 5
XPS analyses of the surface of the SnO2 and ATO films.
| | Sample | % O531.5 | % Sn | % O530 | % Sb | [O530 + O531.5]/2[Sn] + 1.5[Sb] |
| | S11 (SnO2) | 26.55 | 25.94 | 47.50 | — | 1.427 | | A16 (5% ATO) | 36.84 | 36.58 | 17.59 | 8.97 | 0.628 | | A17 (10% ATO) | 24.77 | 59.34 | 5.09 | 10.79 | 0.221 | | A13 (15% ATO) | 41.13 | 27.86 | 19.63 | 10.37 | 0.866 |
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