The Relationship between Nanocluster Precipitation and Thermal Conductivity in Si/Ge Amorphous Multilayer Films: Effects of Cu Addition

Figure 4

Results of thermal conductivity obtained using the Green-Kubo equation. Specimen 1: Si/Ge, Specimen 2: Si/(Ge + Cu), Specimen 3: (Si + Cu)/(Ge + Cu), Specimen 4: Si/Cu/Ge/Cu, and Specimen 5: Si/Cu/Ge.