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Journal of Nanomaterials
Volume 2016, Article ID 9245159, 8 pages
Research Article

Fabrication of Si/SiO2 Superlattice Microwire Array Solar Cells Using Microsphere Lithography

1Japan Science and Technology Agency (JST), Fukushima Renewable Energy Institute (FREA), Koriyama, Fukushima 963-0215, Japan
2Department of Physical Electronics, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan
3Advanced Research Laboratories, Tokyo City University, Setagaya, Tokyo 158-0082, Japan

Received 21 July 2016; Accepted 27 September 2016

Academic Editor: Xiaopeng Li

Copyright © 2016 Shigeru Yamada et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


A fabrication process for silicon/silicon dioxide (Si/SiO2) superlattice microwire array solar cells was developed. The Si/SiO2 superlattice microwire array was fabricated using a microsphere lithography process with polystyrene particles. The solar cell shows a photovoltaic effect and an open-circuit voltage of 128 mV was obtained. The limiting factors of the solar cell performance were investigated from the careful observations of the solar cell structures. We also investigated the influence of the microwire array structure on light trapping in the solar cells.