Template Transfer Nanoimprint for Uniform Nanopores and Nanopoles

Figure 1

Scheme of the template transfer imprinting process for the preparation of nanopore structures. Forming amorphous alloy (or PMMA) nanorod arrays by hot-press molding amorphous alloy (or PMMA) into AAO porous substrates (a); removing AAO templates by chemical etching process (b); reforming nanopore films by hot-embossing the nanorod arrays into polymer film on substrates (c); cleaning the bottom residues in pores of the films by oxygen plasmon (d).

(a)

(b)

(c)

(d)