Template Transfer Nanoimprint for Uniform Nanopores and Nanopoles

Figure 5

SEM image of the type ILR-1050 photoresist nanopore arrays prepared from Pt-based nanorod arrays. (a) and (b): 94.5 ± 12.2 nm. SEM image of the SU-8 photoresist nanopore arrays prepared from PMMA-based nanorod arrays. (c) and (d): 207 ± 26.4 nm. The insets in (a) and (c) give the diameter histograms of nanopores. (b) and (d) are the magnified local images of these nanopores.

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