Morphology, Microstructure, and Hydrogen Content of Carbon Nanostructures Obtained by PECVD at Various Temperatures

<div>Top view SEM of carbon nanostructures grown on Si substrate using PECVD at different <svg height="12.1436pt" id="M6" style="vertical-align:-3.18148pt" version="1.1" viewbox="-0.0498162 -8.96212 14.8613 12.1436" width="14.8613pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M620 675H597C578 656 570 650 541 650H144C112 650 104 653 94 675H72C59 618 42 552 23 493L53 491C71 534 88 564 105 585C124 608 144 615 238 615H290L197 121C182 40 174 34 88 28L82 0H361L367 28C275 34 266 38 281 121L374 615H441C522 615 543 608 553 583C562 560 566 531 565 493L597 494C603 551 612 629 620 675Z" id="g113-85"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.176,3.132)"><path d="M786 370C786 572 637 650 431 650H137L130 618C217 606 220 603 204 519L129 127C115 48 107 39 26 30L18 0H270C410 0 516 20 609 75C722 140 786 240 786 370ZM683 373C683 178 547 40 323 40C298 40 264 40 241 45C213 51 207 64 220 127L295 545C304 582 309 595 320 601C335 610 367 613 406 613C570 613 683 538 683 373Z" id="g50-69"></path></g></svg>: (a) 473 K, (b) 573 K, (c) 673 K, (d) 773 K, (e) 873 K, and (f) 973 K.</div>

Journal of Nanomaterials

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Figure 1

Figure 1: Morphology, Microstructure, and Hydrogen Content of Carbon Nanostructures Obtained by PECVD at Various Temperatures 