Research Article

Stoichiometry Calculation in BaxSr1−xTiO3 Solid Solution Thin Films, Prepared by RF Cosputtering, Using X-Ray Diffraction Peak Positions and Boltzmann Sigmoidal Modelling

Figure 5

(a) Lattice parameter variation for (110), (111), and (211) planes versus the parameter calculated from XRD data. The inset shows the thickness of the samples
(b) Lattice parameter variation for (110), (111), and (211) planes versus the parameter calculated from EDS data