CO Gas-Induced Resonance Frequency Shift of ZnO-Functionalized Microcantilever in Humid Air

Table 1

Energy dispersive spectroscopy (EDS) result for ZnO.

Element	Mass%	Error%	Atom%
O	12.29	0.31	36.43
Si	2.65	0.35	4.48
Zn	79.63	1.54	57.78
Au	5.43	1.04	1.31
Total	100.00		100.00