Research Article
Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings
Table 2
Overview of the coatings prepared by DCMS.
| C (at. %) | Lattice parameter (Å) | Grain size (nm) | a-C:H phase (%) | MGS (nm) | Hardness (GPa) |
| Ni-free | | | | | | 29.5 | 4.2761 | 26.6 | 17.2 | 0.799 | 11.4 ± 0.8 | 38.4 | | 20.6 | | | | 39.3 | 4.3233 | 17.8 | 26.4 | 0.904 | 20.7 ± 1.6 | 49.0 | 4.3578 | 27.5 | 29.0 | | 24.4 ± 1.8 | 53.4 | 4.3634 | 17.8 | 13.7 | | 33.3 ± 4.3 | 55.9 | 4.3547 | 20.7 | 25.7 | 1.016 | 26.8 ± 1.2 | 61.3 | 4.3483 | 14.4 | 34.8 | 1.065 | 26.8 ± 2.7 | 65.1 | 4.3405 | 4.2 | 66.5 | 0.991 | 21.2 ± 2.5 | Ni-doped | | | | | | 28.8 | 4.3010 | 5.5 | 2.6 | 0.025 | 20.0 ± 1.1 | 36.9 | 4.3391 | 8.8 | 14.2 | 0.248 | 19.0 ± 1.9 | 39.4 | 4.3521 | 12.9 | 3.8 | 0.088 | 23.4 ± 2.3 | 41.9 | 4.3601 | 21.8 | 13.3 | 0.562 | 29.1 ± 3.1 | 46.3 | 4.3678 | 19.2 | 11.3 | 0.404 | 25.8 ± 2.3 | 50.5 | 4.3411 | 23.4 | 32.9 | | 24.2 ± 2.2 | 52.4 | 4.3472 | | | | | 52.9 | | 20.1 | 14.3 | 0.556 | 23.9 ± 2.6 | 56.5 | 4.3419 | 11.2 | 41.4 | | 30.6 ± 1.8 | 57.5 | 4.3450 | 9.2 | 39.7 | | 29.9 ± 2.0 | 57.8 | 4.3489 | 7.8 | 44.8 | | 22.6 ± 3.5 | 64.4 | 4.3432 | 6.1 | 40.2 | 0.609 | 21.4 ± 1.9 | 66.4 | 4.3229 | 4.1 | 54.8 | 0.688 | 27.5 ± 2.3 |
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