Dynamic Interferometry Lithography on a TiO₂ Photoresist Sol-Gel for Diffracting Deflector Module

Figure 1

UV-visible spectra: bare glass (a); xerogel coated glass heat treated at 110°C (b); exposed xerogel film on glass (c); single layer xerogel film on glass after heat treatment at 500°C (d); three-layer xerogel film on glass heat treated at 500°C (e).