Dynamic Interferometry Lithography on a TiO₂ Photoresist Sol-Gel for Diffracting Deflector Module

Figure 9

Efficiency of (a) the −1st order, (b) the +1st order, and (c) the sum of the two orders as a function of the incidence angle for a 600 nm period, 300 nm thickness, and 1.65 refractive index TiO₂ grating.