Research Article

Influences of Bath Chemistry and Plating Variables on Characteristics of Electroless Ni–P Films on Si Wafers from Alkaline Citrate Solutions

Table 2

Bath composition and characteristics of selected samples.

SampleNi2+ (g·L−1)Cit (g·L−1) (g·L−1) (min) (mg)pHNi (wt%)P (wt%)Figure

Number 14252040154.070°C1089 ± 0.211 ± 0.27(b), 9(b), 9(d)
Number 172520406011.570°C990 ± 0.210 ± 0.28(a), 8(b), 8(c)
Number 19252020150.370°C995 ± 5.49.3 ± 0.37(c), 9(a), 9(c)
Number 21252020150.470°C1287 ± 0.313 ± 0.37(d)
Number 23252040150.160°C989 ± 0.611 ± 0.67(e)
Number 25252040152.290°C989 ± 0.29 ± 0.27(f)

Note: w^ is the mass gain of sample, t~ is the plating time, T# is the plating temperature; plating time of 15 min and 30 min, respectively.