Research Article
Influences of Bath Chemistry and Plating Variables on Characteristics of Electroless Ni–P Films on Si Wafers from Alkaline Citrate Solutions
Table 2
Bath composition and characteristics of selected samples.
| Sample | Ni2+ (g·L−1) | Cit− (g·L−1) | (g·L−1) | (min) | (mg) | | pH | Ni (wt%) | P (wt%) | Figure |
| Number 14 | 25 | 20 | 40 | 15 | 4.0 | 70°C | 10 | 89 ± 0.2 | 11 ± 0.2 | 7(b), 9(b), 9(d) | Number 17 | 25 | 20 | 40 | 60 | 11.5 | 70°C | 9 | 90 ± 0.2 | 10 ± 0.2 | 8(a), 8(b), 8(c) | Number 19 | 25 | 20 | 20 | 15 | 0.3 | 70°C | 9 | 95 ± 5.4 | 9.3 ± 0.3 | 7(c), 9(a), 9(c) | Number 21 | 25 | 20 | 20 | 15 | 0.4 | 70°C | 12 | 87 ± 0.3 | 13 ± 0.3 | 7(d) | Number 23 | 25 | 20 | 40 | 15 | 0.1 | 60°C | 9 | 89 ± 0.6 | 11 ± 0.6 | 7(e) | Number 25 | 25 | 20 | 40 | 15 | 2.2 | 90°C | 9 | 89 ± 0.2 | 9 ± 0.2 | 7(f) |
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Note: w^ is the mass gain of sample, t~ is the plating time, T# is the plating temperature; plating time of 15 min and 30 min, respectively. |