Graphene Membrane as Suspended Mask for Lithography

Figure 8

(a)SEM micrographs after Ge deposition on GSM with intact (bottom 6) and carved (top 3) structures; (b) a close view of a carved membrane with Ge on top; (c) dimensional measurements on the Ge nanowire after mask lift-off; (d) an array of wires.

(a)

(b)

(c)

(d)