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Journal of Nanomaterials
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2018
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Article
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Fig 5
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Research Article
Effect of Photoillumination on Gold-Nanoparticle-Assisted Chemical Etching of Silicon
Figure 5
SEM images of the photoilluminated MacEtch-processed samples with GNPs. The etching times were (a) 5, (b) 25, and (c) 35 min.
(a)
(b)
(c)