Journal of Nanomaterials / 2018 / Article / Fig 12

Research Article

Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

Figure 12

Compensation of the measured surface profile before and after error compensation. (a) Comparison of the raw data and result after error compensation. (b) Details of the surface profile after error compensation.
(a)
(b)

Article of the Year Award: Outstanding research contributions of 2020, as selected by our Chief Editors. Read the winning articles.