Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

<div>Compensation of the measured surface profile before and after error compensation. (a) Comparison of the raw data and result after error compensation. (b) Details of the surface profile after error compensation.</div>

Journal of Nanomaterials

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Figure 12

Figure 12: Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System 