Surface Profile Measurement and Error Compensation of Triangular Microstructures Employing a Stylus Scanning System

Table 1

Key parameters of the proposed measurement system.

Probing system	Measurement range	30 mm
	Resolution (linear encoder)	2.5 nm
	Sampling frequency	Up to 20 MHz
	Stability (RMS)	1.6 nm
Microstylus	Tip material	Diamond
	Tip radius	2 μm
	Tip angle	20°
Linear scanning stage	Scanning range	5 mm
	Resolution	7 nm
	Min. incremental motion	50 nm
	Velocity	1 mm/s (max.)