Research Article
Geometry-Controlled Carbon Coils by SF6 Flow Injection Time with Reaction Temperature
Table 1
Experimental conditions for the deposition of samples A–L.
| Samples | C2H2 flow rate (sccm) | C2H2 flow injection time (min) | SF6 flow rate (sccm) | SF6 flow injection time (min) | Total pressure (Torr) | Substrate temperature (°C) |
| A | 500 | 60 | 40 | 5 | 100 | 550 | B | 500 | 60 | 40 | 15 | 100 | 550 | C | 500 | 60 | 40 | 30 | 100 | 550 | D | 500 | 60 | 40 | 60 | 100 | 550 | E | 500 | 60 | 40 | 5 | 100 | 650 | F | 500 | 60 | 40 | 15 | 100 | 650 | G | 500 | 60 | 40 | 30 | 100 | 650 | H | 500 | 60 | 40 | 60 | 100 | 650 | I | 500 | 60 | 40 | 5 | 100 | 750 | J | 500 | 60 | 40 | 15 | 100 | 750 | K | 500 | 60 | 40 | 30 | 100 | 750 | L | 500 | 60 | 40 | 60 | 100 | 750 |
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