Sputtered PdO Decorated TiO₂ Sensing Layer for a Hydrogen Gas Sensor

Figure 4

The depth profiles from Auger electron spectroscopy (AES) of PdO decorated TiO₂ films with different PdO thickness of (a) 3, (b) 4.5, (c) 6.5, and (d) 13 nm. The thickness of PdO film was converted from the sputtering time using the AES’s sputtering rate of 3.3 nm/min.

(a)

(b)

(c)

(d)