Optical and Piezoelectric Properties of Mn-Doped ZnO Films Deposited by Sol-Gel and Hydrothermal Methods

Figure 3

SEM micrographs (a, b, c, d) and EDX spectra (e) Mn (1%); (f) Mn (2%); (g) Mn (5%) of Mn-doped ZnO films prepared by HT method.

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(e)

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(g)