Optical and Piezoelectric Properties of Mn-Doped ZnO Films Deposited by Sol-Gel and Hydrothermal Methods

Table 1

Unit cell parameters and crystallite size determined by XRD analysis.

Sample name	Deposition method	Unit cell parameters		Crystallite size (nm)
		(Å)	(Å)
ZnO	S-G	3.2444	5.1802	18.7
ZnO + 1% Mn		3.2364	5.1898	13.8
ZnO + 2% Mn		3.2390	5.1808	17.1
ZnO + 5% Mn		3.2372	5.1900	13.2
ZnO + 1% Mn	HT	3.2505	5.2027	15.4
ZnO + 2% Mn		3.2500	5.2030	17.5
ZnO + 5% Mn		3.2497	5.2065	15.0