Optical and Piezoelectric Properties of Mn-Doped ZnO Films Deposited by Sol-Gel and Hydrothermal Methods

Table 2

Thickness, roughness, and fit error (MSE) obtained by modelling of the experimental SE spectra on Mn-doped ZnO films prepared by SG and HT methods.

Films deposited on Pt/Ti/SiO2/Si	ZnO	ZnO + 1% Mn	ZnO + 2% Mn	ZnO + 5% Mn
S-G method
Thickness (nm)	62.84	59.66	59.46	62.12
Roughness (nm)	2.46	0.87	0.22	0.69
MSE	1.60	1.58	1.35	1.52
HT method
Thickness (nm)	—	802.90	1175.23	985.98
Roughness (nm)	—	4.82	6.34	11.57
MSE	—	2.96	1.87	8.37