Structural Evolution and Photoluminescence of SiO<sub>2</sub> Layers with Sn Nanoclusters Formed by Ion Implantation

<div>PL spectra of the implanted samples of SiO<sub>2</sub> (600 nm)/Si before and after annealing.</div>

Journal of Nanomaterials

Figure 5: Structural Evolution and Photoluminescence of SiO<sub>2</sub> Layers with Sn Nanoclusters Formed by Ion Implantation 