Journals
Publish with us
Publishing partnerships
About us
Blog
Journal of Nanomaterials
Journal overview
For authors
For reviewers
For editors
Table of Contents
Special Issues
Journal of Nanomaterials
/
2019
/
Article
/
Fig 1
/
Research Article
Comprehensive Study of Kinetics of Processes Competing during PECVD Ultrathin Silicon Layer High-Temperature Annealing
Figure 1
Schema of the (a) used process flow and the (b) fabricated structure.
(a)
(b)