Comprehensive Study of Kinetics of Processes Competing during PECVD Ultrathin Silicon Layer High-Temperature Annealing

Figure 9

Schematic view of two potential interpretations of complex composition in PECVD Si layer: (a) continuous crystalline silicon “sublayer” and (b) matrix of silicon nanocrystals, both within the oxidized PECVD Si layer.

(a)

(b)