A Rapid Bonding Method for Fabricating Mixing Microfluidic Chip Based on Micromachining Technology

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr class="thead"><td class="align_left">Object</td><td class="align_center">Equipment</td><td class="align_center">Bonding step</td><td class="align_center">Bonding time</td></tr><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr><td class="align_left">Glass/glass</td><td class="align_center">Muffle furnace</td><td class="align_center">Two</td><td class="align_center">More than 12 hours</td></tr><tr><td class="align_left">Glass/silicon</td><td class="align_center">Electrostatic bonding machine</td><td class="align_center">One</td><td class="align_center">Several hours</td></tr><tr><td class="align_left">Glass/PDMS and PDMS/PDMS</td><td class="align_center">Plasma cleaning machine</td><td class="align_center">Two</td><td class="align_center">More than half an hour</td></tr><tr><td class="align_left">PMMA/PMMA</td><td class="align_center">Hot-embossing machine</td><td class="align_center">One</td><td class="align_center">More than half an hour</td></tr><tr><td class="align_left">Glass/polyurethane</td><td class="align_center">No</td><td class="align_center">Two</td><td class="align_center">Only 2 minutes</td></tr><tr class="table-tr"><td colspan="4"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>Comparison of different bonding methods.</div>

Journal of Nanomaterials

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Table 1

Table 1: A Rapid Bonding Method for Fabricating Mixing Microfluidic Chip Based on Micromachining Technology 