Research Article

Strain Properties of Multicomponent Nanosize Film Materials

Figure 1

Microstructure and diffraction patterns from sample based on Cr(19), Al(8), Co(21), Cu(12), Ni(19), and Fe(20) (a, b) and based on Cr(18), Al(9), Co(20), Cu(19), Ni(19), and Fe(18) (c, d). The concentration of elements in at% is indicated in parentheses. The sample thickness d ≅ 38 nm (a, b) and 40 nm (c, d).