Research Article
Micro- and Nanostructure of Layered Si\Sn\Si Films, Formed by Vapor Deposition
Figure 9
One‐dimensional distribution of surface roughness of structures a‐Si (~50 nm)/Sn (~15 nm)/a‐Si (~200 nm) (a) and a‐Si (~50 nm)/Sn (~15 nm)/a‐Si (~200 nm) (b).
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