Table of Contents
Journal of Nanoscience
Volume 2015, Article ID 328742, 9 pages
http://dx.doi.org/10.1155/2015/328742
Research Article

A Novel Method for Investigating the Casimir Effect on Pull-In Instability of Electrostatically Actuated Fully Clamped Rectangular Nano/Microplates

Department of Mechanical Engineering, Ferdowsi University of Mashhad, P.O. Box 91775-1111, Mashhad, Iran

Received 30 June 2014; Revised 30 October 2014; Accepted 3 January 2015

Academic Editor: Adriana Szeghalmi

Copyright © 2015 Arman Mohsenzadeh et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. S. Srivastav, P. Bhardwaj, and Summit, “Fabrication, sensing & application of MEMS/NEMS technology,” International Journal of Computational Engineering & Management, vol. 12, pp. 57–60, 2011. View at Google Scholar
  2. A. R. Askari and M. Tahani, “Investigating nonlinear vibration of a fully clamped nanobeam in presence of the van der waals attraction,” Applied Mechanics and Materials, vol. 226–228, pp. 181–185, 2012. View at Publisher · View at Google Scholar · View at Scopus
  3. A. Nisar, N. Afzulpurkar, B. Mahaisavariya, and A. Tuantranont, “MEMS-based micropumps in drug delivery and biomedical applications,” Sensors and Actuators B: Chemical, vol. 130, no. 2, pp. 917–942, 2008. View at Publisher · View at Google Scholar · View at Scopus
  4. M. Tahani and A. R. Askari, “Accurate electrostatic and van der Waals pull-in prediction for fully clamped nano/micro-beams using linear universal graphs of pull-in instability,” Physica E, vol. 63, pp. 151–159, 2014. View at Publisher · View at Google Scholar
  5. S.-A. Zhou, “On forces in microelectromechanical systems,” International Journal of Engineering Science, vol. 41, no. 3–5, pp. 313–335, 2003. View at Publisher · View at Google Scholar · View at Scopus
  6. A. Gusso and G. J. Delben, “Influence of the Casimir force on the pull-in parameters of silicon based electrostatic torsional actuators,” Sensors and Actuators A: Physical, vol. 135, no. 2, pp. 792–800, 2007. View at Publisher · View at Google Scholar · View at Scopus
  7. F. M. Serry, D. Walliser, and G. J. Maclay, “The role of the Casimir effect in the static deflection and stiction of membrane strips in microelectromechanical systems (MEMS),” Journal of Applied Physics, vol. 84, no. 5, pp. 2501–2506, 1998. View at Publisher · View at Google Scholar · View at Scopus
  8. H. Moeenfard, A. Darvishian, and M. T. Ahmaidan, “Static behavior of nano/micromirrors under the effect of Casimir force, an analytical approach,” Journal of Mechanical Science and Technology, vol. 26, no. 2, pp. 537–543, 2012. View at Publisher · View at Google Scholar · View at Scopus
  9. C. Farina, “The Casimir effect: some aspects,” Brazilian Journal of Physics, vol. 36, pp. 1137–1149, 2006. View at Publisher · View at Google Scholar · View at Scopus
  10. Y. T. Beni, A. Koochi, and M. Abadyan, “Theoretical study of the effect of Casimir force, elastic boundary conditions and size dependency on the pull-in instability of beam-type NEMS,” Physica E: Low-Dimensional Systems and Nanostructures, vol. 43, no. 4, pp. 979–988, 2011. View at Publisher · View at Google Scholar · View at Scopus
  11. Y. T. Beni and M. Abadyan, “Use of strain gradient theory for modeling the size-dependent pull-in of rotational nano-mirror in the presence of molecular force,” International Journal of Modern Physics B, vol. 27, no. 18, Article ID 1350083, 18 pages, 2013. View at Publisher · View at Google Scholar · View at MathSciNet · View at Scopus
  12. Y. T. Beni, A. Koochi, and M. Abadyan, “Using modified couple stress theory for modeling the size-dependent pull-in instability of torsional nano-mirror under Casimir force,” International Journal of Optomechatronics, vol. 8, no. 1, pp. 47–71, 2014. View at Publisher · View at Google Scholar · View at Scopus
  13. Y. T. Beni, A. R. Vahdati, and M. Abadyan, “Using ALE-FEM to simulate the instability of beam-type nano-actuator in the present of electrostatic field and dispersion forces, Iran,” Iranian Journal of Science and Technology, vol. 37, pp. 1–9, 2013. View at Google Scholar
  14. W. H. Lin and Y. P. Zhao, “Dynamic behavior of nanoscale electrostatic actuators with Casimir force,” Chaos, Solitons & Fractals, vol. 23, pp. 1777–1785, 2004. View at Google Scholar
  15. A. Ramezani, A. Alasty, and J. Akbari, “Closed-form solutions of the pull-in instability in nano-cantilevers under electrostatic and intermolecular surface forces,” International Journal of Solids and Structures, vol. 44, no. 14-15, pp. 4925–4941, 2007. View at Publisher · View at Google Scholar · View at Scopus
  16. A. Koochi, A. Kazemi, F. Khandani, and M. Abadyan, “Influence of surface effects on size-dependent instability of nano-actuators in the presence of quantum vacuum fluctuations,” Physica Scripta, vol. 85, no. 3, Article ID 035804, 2012. View at Publisher · View at Google Scholar · View at Scopus
  17. Y. T. Beni, A. Koochi, A. S. Kazemi, and M. Abadyan, “Modeling the influence of surface effect and molecular force on pull-in voltage of rotational nano-micro mirror using 2-DOF model,” Canadian Journal of Physics, vol. 90, no. 10, pp. 963–974, 2012. View at Publisher · View at Google Scholar · View at Scopus
  18. Y. T. Beni, M. Abadyan, and A. Koochi, “Effect of the Casimir attraction on the torsion/bending coupled instability of electrostatic nano-actuators,” Physica Scripta, vol. 84, no. 6, Article ID 065801, 2011. View at Publisher · View at Google Scholar · View at Scopus
  19. A. Farrokhabadi, N. Abadian, R. Rach, and M. Abadyan, “Theoretical modeling of the Casimir force-induced instability in freestanding nanowires with circular cross-section,” Physica E, vol. 63, pp. 67–80, 2014. View at Google Scholar
  20. X. Zhao, E. M. Abdel-Rahman, and A. H. Nayfeh, “A reduced-order model for electrically actuated microplates,” Journal of Micromechanics and Microengineering, vol. 14, no. 7, pp. 900–906, 2004. View at Publisher · View at Google Scholar · View at Scopus
  21. R. C. Batra, M. Porfiri, and D. Spinello, “Review of modeling electrostatically actuated microelectromechanical systems,” Smart Materials and Structures, vol. 16, no. 6, pp. R23–R31, 2007. View at Publisher · View at Google Scholar · View at Scopus
  22. R. C. Batra, M. Porfiri, and D. Spinello, “Reduced-order models for microelectromechanical rectangular and circular plates incorporating the Casimir force,” International Journal of Solids and Structures, vol. 45, no. 11-12, pp. 3558–3583, 2008. View at Publisher · View at Google Scholar · View at Scopus
  23. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells, McGraw-Hill, New York, NY, USA, 1959.
  24. J. N. Reddy, Energy Principles and Variational Methods in Applied Mechanics, John Wiley & Sons, New York, NY, USA, 2002.
  25. A. R. Askari and M. Tahani, “Analytical approximations to nonlinear vibration of a clamped nanobeam in presence of the Casimir force,” International Journal of Aerospace and Lightweight Structures, vol. 2, no. 3, pp. 317–334, 2012. View at Publisher · View at Google Scholar
  26. A. R. Askari and M. Tahani, “An alternative reduced order model for electrically actuated micro-beams under mechanical shock,” Mechanics Research Communications, vol. 57, pp. 34–39, 2014. View at Publisher · View at Google Scholar · View at Scopus
  27. COMSOL Multiphysics 4.3b Software Corporation, “Pull-In Voltage for a Biased Resonator-3D,” 2013.
  28. J. P. Arenas, “On the vibration analysis of rectangular clamped plates using the virtual work principle,” Journal of Sound and Vibration, vol. 266, no. 4, pp. 912–918, 2003. View at Publisher · View at Google Scholar · View at Scopus
  29. O. Francais and I. Dufour, “Normalized abacus for the global behavior of the diaphragms: pneu matic, electrostatic, piezoelectric or electromagnetic actuation,” Journal of Modeling and Simulation of Microsystems, vol. 12, pp. 149–160, 1999. View at Google Scholar
  30. P. M. Osterberg, Electrostatically actuated microelectromechanical test structures for material property measurement [Ph.D. thesis], Massachusetts Institute of Technology, Cambridge, Mass, USA, 1995.