Achieving High Aspect Ratio of Track Length to Width in Molds for Discrete Track Recording Media

Figure 2

AFM images of (a) 20 μm long-tracks with 70 nm track width and 50 nm spacing. The center of the exposed area is washed away after development. Image (b) is an enlarged area which shows that the exposed lines are broken and nonuniform. Right side figure shows a curled-shape track which is due to scanning artifact.