Nucleation and Growth of Crystalline Grains in RF-Sputtered TiO₂ Films

Figure 2

Crystallization parameters versus time from TEM data on TiO₂ films annealed at 250^∘C: (a) 𝑋_𝑐(𝑡); (b) 𝜌_𝑔(𝑡). The curves were computed from simultaneous, multivariate leastsquares fits on both data sets.

(a)

(b)