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Journal of Nanotechnology
Volume 2010, Article ID 279608, 6 pages
Research Article

Grids for Applications in High-Temperature High-Resolution Transmission Electron Microscopy

1Department of Physics, Boston College, Chestnut Hill, MA 02467, USA
2Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA

Received 3 March 2010; Revised 25 May 2010; Accepted 17 June 2010

Academic Editor: Thomas Thundat

Copyright © 2010 Yucheng Lan et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


New TEM grids coated with ultrathin amorphous Al2O3 films have been developed using atomic layer deposition technique. The amorphous Al2O3 films can withstand temperatures over 600C in air and 900C in vacuum when the thickness of the Al2O3 film is 2 nm, and up to 1000C in air when the thickness is 25 nm, which makes heating TEM grids with nanoparticles up to 1000C in air and immediate TEM observation without interrupting the nanoparticles possible. Such coated TEM grids are very much desired for applications in high-temperature high-resolution transmission electron microscopy.