Grids for Applications in High-Temperature High-Resolution Transmission Electron Microscopy

Figure 2

Low magnification TEM images of ALD-Al₂O₃ films with 2 nm thickness heated at (a) 600^∘C in air, (b) 700^∘C in air, (c) 900^∘C in vacuum, and (d) 985^∘C in vacuum. The insets in (a) and (c) are enlarged TEM images of the Al₂O₃ film over a hole of holey carbon film.

(a)

(b)

(c)

(d)