Exploration of the Direct Use of Anodized Alumina as a Mold for Nanoimprint Lithography to Fabricate Magnetic Nanostructure over Large Area

<table>Schematic drawing of the fabrication of FePt patterned structure by using anodized alumina (AAO) mold. (a) Deposition of Al film on a Si wafer, (b) fabrication of AAO and coating it with thin SiO<sub>2</sub> and SAM layer, (c) fabrication of L1<sub>0</sub> ordered FePt thin film, (d) spin coating of the resist on FePt thin film, (e) nanoimprinting, (f) demolding, (g) removal of the residual layer by reactive ion etching (RIE) and transfer of the pattern into FePt film by Ar ion milling, and (h) removal of the resist to leave the FePt pillars on the substrate.</table>

Journal of Nanotechnology

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Figure 1: Exploration of the Direct Use of Anodized Alumina as a Mold for Nanoimprint Lithography to Fabricate Magnetic Nanostructure over Large Area 

Figure 1 | Exploration of the Direct Use of Anodized Alumina as a Mold for Nanoimprint Lithography to Fabricate Magnetic Nanostructure over Large Area 