Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting

<table>Nanoimprinting system: this system consists of a press platen in a double-column frame and an <svg height="7.1624999" id="M15" style="vertical-align:-0.11285pt" version="1.1" viewbox="0 0 8.7250004 7.1624999" width="8.7250004" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,7.1625)">
<g transform="translate(72,-66.27)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑥</tspan>
</text>
</g>
</g>
</svg>-<svg height="9.8625002" id="M16" style="vertical-align:-2.29482pt" version="1.1" viewbox="0 0 7.875 9.8625002" width="7.875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,9.8625)">
<g transform="translate(72,-64.11)">
<text transform="matrix(1,0,0,-1,-71.95,66.45)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑦</tspan>
</text>
</g>
</g>
</svg>-<svg height="10.7375" id="M17" style="vertical-align:-0.13794pt" version="1.1" viewbox="0 0 8.3125 10.7375" width="8.3125" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.7375)">
<g transform="translate(72,-63.41)">
<text transform="matrix(1,0,0,-1,-71.95,63.6)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝜃</tspan>
</text>
</g>
</g>
</svg> table. The quartz mold was fixed under the press platen, and the substrate was fixed on the <svg height="7.1624999" id="M18" style="vertical-align:-0.11285pt" version="1.1" viewbox="0 0 8.7250004 7.1624999" width="8.7250004" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,7.1625)">
<g transform="translate(72,-66.27)">
<text transform="matrix(1,0,0,-1,-71.95,66.44)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑥</tspan>
</text>
</g>
</g>
</svg>-<svg height="9.8625002" id="M19" style="vertical-align:-2.29482pt" version="1.1" viewbox="0 0 7.875 9.8625002" width="7.875" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,9.8625)">
<g transform="translate(72,-64.11)">
<text transform="matrix(1,0,0,-1,-71.95,66.45)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑦</tspan>
</text>
</g>
</g>
</svg>-<svg height="10.7375" id="M20" style="vertical-align:-0.13794pt" version="1.1" viewbox="0 0 8.3125 10.7375" width="8.3125" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.7375)">
<g transform="translate(72,-63.41)">
<text transform="matrix(1,0,0,-1,-71.95,63.6)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝜃</tspan>
</text>
</g>
</g>
</svg> table.</table>

Journal of Nanotechnology

Large-Scale Atmospheric Step-and-Repeat UV Nanoimprinting

Figure 2