A Review on Aerosol-Based Direct-Write and Its Applications for Microelectronics

Table 2

Stokes-Cunningham slip correction factors, reprinted from Li and Wang [41] http://link.aps.org/doi/10.1103/PhysRevE.68.061206, and Allen and Raabe [48], Copyright 2003 and 1982, with permission from American Physical Society and Elsevier, respectively.

Author, Year	Mean free path (𝜇m)	𝐴	𝐵	𝐸	𝐴+𝐵
Knudsen and Weber, 1911 [46]	0.09417	0.772	0.40	1.63	1.172
Millikan, 1923 [42]	0.09417	0.864	0.29	1.25	1.154
Langmuir, 1942 [49]	0.133	0.62	0.22	2.20	0.84
Davies, 1945 [50]	0.066	1.257	0.40	1.10	1.657
DeMarcus and Thomas, 1952 [51]	0.0655	1.25	0.44	1.09	1.690
Reif, 1958 [52]	0.0652	1.26	0.45	1.08	1.710
Fuchs, 1964 [53]	0.0653	1.246	0.42	0.87	1.666
Dahneke et al., 1982 [54]	0.066	1.234	0.414	0.87	1.648
Allen and Raabe, 1982 [48]	0.0673	1.155	0.471	0.596	1.626
Buckley and Loyalka, 1989 [55]	—	1.099	0.518	0.425	1.617