Journal of Nanotechnology / 2012 / Article / Tab 2

Review Article

A Review on Aerosol-Based Direct-Write and Its Applications for Microelectronics

Table 2

Stokes-Cunningham slip correction factors, reprinted from Li and Wang [41], and Allen and Raabe [48], Copyright 2003 and 1982, with permission from American Physical Society and Elsevier, respectively.

Author, YearMean free path ( 𝜇 m) 𝐴 𝐵 𝐸 𝐴 + 𝐵

Knudsen and Weber, 1911 [46]0.094170.7720.401.631.172
Millikan, 1923 [42]0.094170.8640.291.251.154
Langmuir, 1942 [49]0.1330.620.222.200.84
Davies, 1945 [50]0.0661.2570.401.101.657
DeMarcus and Thomas, 1952 [51]0.06551.250.441.091.690
Reif, 1958 [52]0.06521.260.451.081.710
Fuchs, 1964 [53]0.06531.2460.420.871.666
Dahneke et al., 1982 [54]0.0661.2340.4140.871.648
Allen and Raabe, 1982 [48]0.06731.1550.4710.5961.626
Buckley and Loyalka, 1989 [55]1.0990.5180.4251.617

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