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Journal of Nanotechnology
Volume 2012, Article ID 354809, 10 pages
Research Article

GISAXS/GIXRD View of ZnO Films with Hierarchical Structural Elements

1Department of Physics, Department of Inorganic Technology, and Department of Chemistry, Faculty of Chemistry and Technology, University of Split, Teslina 10, 21000 Split, Croatia
2SAXS beamline, Sincrotrone Trieste, Strada Statale 14, km 163,5, AREA Science Park, 34149 Basovizza, Italy
3Division of Materials Physics, Ruđer Bošković Institute, Bijenička 54, 10000 Zagreb, Croatia
4Polytechnic “Marko Marulić”, Krešimirova 30, 22300 Knin, Croatia

Received 3 August 2012; Accepted 9 November 2012

Academic Editor: Thomas Thundat

Copyright © 2012 M. Lučić Lavčević et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


ZnO films constituted of porous sheet-like structures, formed by calcination of precursor, were examined using scanning electron microscopy and simultaneous small-angle scattering and diffraction of the synchrotron-sourced X-rays, under the grazing-incidence conditions. The presented analysis enabled insight into the complexity of the film morphology, which revealed substrate sensitivity on the microscopic and nanoscopic length scales. The average size and spatial arrangement of nanoparticles, single-crystal domains, and the average size and features of nanopores in sheet-like structures were determined for films deposited on glass, polycrystalline ZnO layer, and silicon.