561250.fig.0014a
(a)
561250.fig.0014b
(b)
Figure 14: Three-step grooves on the nanoperiod multilayer films. (a) CN/BN 4-nm-period film; processing loads of 40, 50, 70 μN from left to right. (b) CN/BN 2-nm-period film; processing loads of 10, 15, 20 μN from left to right.