Nano- and Macrotribological Properties of Nanoperiod Multilayer Films Deposited by Bias Sputtering

Figure 9

Dependence of nanometer-scale wear properties on layer period of (CN/BN)n multilayer films obtained by applying a load of 10 μN and one number of scanning cycle.

(a) layer period 2 nm

(b) layer period 4 nm

(c) Layer period 8 nm

(d) Layer period 10 nm